3D Optical Profiler

ZYGO's ZeGage™ products have been taking interferometric surface profiling out of the lab and into production for nearly a decade. With the ZeGage Pro and Pro HR systems, powerful and trusted capabilities such as SureScan™ technology for vibration robust metrology are now paired with ZYGO's exclusive Part Finder and Smart Setup tools to make sample changes fast and easy, minimizing wasted time and maximizing throughput.

•Proprietary non-contact measurement technology is enhanced with SureScan™ technology for low sensitivity to vibration and easy placement anywhere within your facility.
•Quantitative surface metrology with nanometer-level precision provides superior gage capability.
•High resolution 1.9 million pixel image sensor provides fast areal measurements in seconds, for excellent surface detail and visualization.
•Fully-automated measurement sequences and field stitching enable high resolution inspection of large areas. (Requires optional motorized part stage.)

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