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Description
To detect Silicon Carbide, Sapphire, Silicon and other translucent wafers.
Applicable to 6, 8 and 12 inch wafers
Translucent wafer mode (8 and 12 inch models)
Free from Electrostatic effects (comb sensor unit)
Applicable to 6, 8 and 12 inch wafers
Translucent wafer mode (8 and 12 inch models)
Free from Electrostatic effects (comb sensor unit)
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