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Description
The Smart Sensing Wafer is designed for semiconductor wafer transfer and equipment condition monitoring. It integrates tri-axis vibration measurement, dual-axis leveling, temperature and humidity sensing, and data logging functions to provide real-time insight into stability changes during wafer handling processes involving Robots, Stages, OHT, FOUP, EFEM, and related equipment.
With wireless Bluetooth transmission and built-in Flash CSV data recording, the Smart Sensing Wafer helps customers quickly identify abnormal vibration, leveling deviation, and environmental changes, improving equipment calibration efficiency, process stability, and predictive maintenance capabilities.
With wireless Bluetooth transmission and built-in Flash CSV data recording, the Smart Sensing Wafer helps customers quickly identify abnormal vibration, leveling deviation, and environmental changes, improving equipment calibration efficiency, process stability, and predictive maintenance capabilities.
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